基于MEMS集成加热器的温控系统研究

北京大学学报（自然科学版）

基于MEMS集成加热器的温控系统研究

江少波,苏卫国,万松,邓康发,张威

北京大学微电子学研究院, 北京 100871;

收稿日期:2013-04-02 出版日期:2014-07-20 发布日期:2014-07-20

Study on Temperature Control System Based on a MEMS Heater

JIANG Shaobo, SU Weiguo, WAN Song, DENG Kangfa, ZHANG Wei

Institute of Microelectronics, Peking University, Beijing 100871;

Received:2013-04-02 Online:2014-07-20 Published:2014-07-20

摘要/Abstract

摘要： 采用MEMS集成加热器设计一个温控系统。所用的加热器效率达到7.35 mm²K/mW, 且功耗低。加热器面积为6 mm×6 mm, 具有较高的系统集成度。该温控系统采用Fuzzy-PID温度控制算法, 温度稳态误差小于0.1°C, 并且约10秒即达到稳态, 响应速度快。使用该系统对MEMS压力计进行环境温控, 可明显抑制器件的温度漂移。

关键词: MEMS传感器, 温度漂移, 集成度, Fuzzy-PID控制

Abstract: The authors present a temperature control system based on a MEMS heater. The MEMS heater has the advantages of high heating efficiency (7.35 mm²K/mW) and low power consumption. Besides, it has a high degree of system integration (6 mm ×6 mm). Fuzzy-PID control method that takes fuzzy adjustment to the PID parameters is used. The temperature control system achieves a high control accuracy of less than 0.1oC and a quick response time of about 10 s. With a MEMS pressure sensor, this system greatly suppresses the temperature drift.

Key words: MEMS sensor, temperature drift, integration, Fuzzy-PID control

中图分类号:

TH703

江少波,苏卫国,万松,邓康发,张威. 基于MEMS集成加热器的温控系统研究[J]. 北京大学学报（自然科学版）.

JIANG Shaobo,SU Weiguo,WAN Song,DENG Kangfa,ZHANG Wei. Study on Temperature Control System Based on a MEMS Heater[J]. Acta Scientiarum Naturalium Universitatis Pekinensis.