偏置电压交变的时分反馈闭环加速度计

偏置电压交变的时分反馈闭环加速度计

黄靖清,赵猛,张婷婷,陈中建,伍峰,洪理琛,刘大河,张雅聪,鲁文高,高成臣,郝一龙

北京大学微纳电子学系微纳米/纳米加工技术国家级重点实验室, 北京 100871;

收稿日期:2013-04-06 出版日期:2014-07-20 发布日期:2014-07-20

Improved Structure of Time-Divided Closed-Loop Accelerometer by Alternating the Voltage Biasing

HUANG Jingqing, ZHAO Meng, ZHANG Tingting, CHEN Zhongjian, WU Feng, HONG Lichen, LIU Dahe, ZHANG Yacong, LU Wengao, GAO Chengchen, HAO Yilong

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics,Peking University, Beijing 100871;

Received:2013-04-06 Online:2014-07-20 Published:2014-07-20

摘要/Abstract

摘要： 提出一种改进结构的时分反馈闭环加速度计, 该结构使用负系数的PID控制器, 只需要一个运算放大器。改进后的结构减小了读出电路的芯片面积, 同时省去一个运算放大器和两个大电阻, 因此能降低系统噪声。读出电路采用0.35 μm高压CMOS工艺, 并包含自检测功能。测试结果显示, 在自检测模式下, 闭环加速度计的线性度为99.72%。在DC到200 Hz内, 输出噪声电压均方根值约为140 μV。

关键词: 比例积分微分控制器, 闭环, 加速度计, 自检测, 微机电系统

Abstract: A new structure of time-divided closed-loop accelerometer is proposed. It requires only one operational amplifier as a negative-coefficient PID is just sufficient. This structure not only reduces the area consumption of the whole chip of the readout circuit, but also lowers the equivalent input noise acceleration as one operational amplifier and two large resistors are reduced. The readout circuit is fabricated using 0.35 μm HV CMOS process, with self-test function included. Test results show that the linearity of 99.72% is achieved under self-test mode. The root-mean-square output noise voltage is around 140 μV from DC to 200 Hz.

Key words: proportional integral derivative controller, closed-loop, accelerometer, self-test function, microelec- tromechanical systems

中图分类号:

TN432

黄靖清,赵猛,张婷婷,陈中建,伍峰,洪理琛,刘大河,张雅聪,鲁文高,高成臣,郝一龙. 偏置电压交变的时分反馈闭环加速度计[J]. 北京大学学报（自然科学版）.

HUANG Jingqing,ZHAO Meng,ZHANG Tingting,CHEN Zhongjian,WU Feng,HONG Lichen,LIU Dahe,ZHANG Yacong,LU Wengao,GAO Chengchen,HAO Yilong. Improved Structure of Time-Divided Closed-Loop Accelerometer by Alternating the Voltage Biasing[J]. Acta Scientiarum Naturalium Universitatis Pekinensis.

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链接本文: https://xbna.pku.edu.cn/CN/

https://xbna.pku.edu.cn/CN/Y2014/V50/I4/729

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