北京大学学报(自然科学版)

基于虚拟仪器的纳米器件电学性能测量系统的实现

梁涛,朱玉振,李成?,魏贤龙,梁学磊,高崧,陈清   

  1. 纳米器件物理与化学教育部重点实验室,北京大学信息科学技术学院电子学系,北京100871;
  • 收稿日期:2007-11-19 出版日期:2008-11-20 发布日期:2008-11-20

The Electrical Measurement System of Nanodevices Based on Virtual Instrument

LIANG Tao, ZHU Yuzhen, LI Chengyao, WEI Xianlong, LIANG Xuelei, GAO Song, CHEN Qing   

  1. Key Laboratory for Physics and Chemistry of Nanodevices, Department of Electronics, School of Electronics Engineering and Computer Science, Peking University, Beijing 100871;
  • Received:2007-11-19 Online:2008-11-20 Published:2008-11-20

摘要: 基于虚拟仪器技术实现了I-V曲线和微分电导的自动化测量系统。为了抑制噪声的影响,应用交流技术开发了有更高精度的锁相微分电导测量系统。实验数据的采集、处理和分析均采用Measurement Studio工具开发完成。系统测试的结果表明系统具有很高的精度和可靠性。展示了用本系统与纳米探针结合在扫描电子显微镜中原位测量单根碳纳米管的结果。

关键词: 虚拟仪器, 电学测量, 微分电导, 纳米器件

Abstract: Based on virtual instrument technology, automatic measurement systems for measuring I-V curve and differential conductance were realized. In order to depress the noise, a lock-in differential conductance measurement system is designed. The data acquisition, processing and analyzing are carried out by using Measurement Studio development tool. The test results indicate that the system has very high precision and reliability. An application of the measurement system is demonstrated which measures a single carbon nanotube inside a scanning electron microscope combining with a nanoprobe system.

Key words: virtual instrument, electrical measurements, differential conductance, nanodevices

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