北京大学学报(自然科学版)

钨针尖放电处理后的场发射特性

陶雄,张兆祥,王鸣生,吴越,张耿民   

  1. 教育部纳米器件物理与化学重点实验室,北京大学信息科学技术学院电子学系,北京,100871
  • 收稿日期:2005-05-10 出版日期:2006-05-20 发布日期:2006-05-20

Field Emission Properties of a Tungsten Tip after Discharge Treatment

TAO Xiong, ZHANG Zhaoxiang, WANG Mingsheng, WU Yue, ZHANG Gengmin   

  1. Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, School of Electronics Engineering and Computer Science, Peking University, Beijing, 100871
  • Received:2005-05-10 Online:2006-05-20 Published:2006-05-20

摘要: 在场发射显微镜(FEM)中使用1万伏以上的电压对钨针尖进行了放电处理。扫描电子显微镜(SEM)和透射电子显微镜(TEM)的观察表明在处理后形成了纳米尺寸的突起。从经过处理的钨针尖能够支取高达1.55mA的场发射电流。针尖的场发射像呈现四重对称,表明它来自单个突起。场发射电流与电压关系符合Fowler-Nordheim (F-N)理论。根据F-N理论算得的场发射面积与TEM下观察到的突起的面积在量级上一致。

关键词: 钨针尖, 场发射, 电弧放电

Abstract: A tungsten tip received discharge treatment under a high voltage over 10kV in a field-emission microscope (FEM). Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) observation showed that some nanometer-scale protrusions resulted from the discharge treatment. The post-treatment tungsten tip delivered a field emission current as high as 1.55mA. The FEM pattern of the tip demonstrated a four-fold symmetry and thus the field emission was attributed to a single protrusion. The dependence of the field emission current on the applied voltage approximately followed the Fowler-Nordheim (F-N) theory. The value of the emission area calculated by the F-N theory is in agreement with that obtained from the TEM observation in the order of magnitude.

Key words: tungsten tip, field emission, arc discharge

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