GaN基二维八重准晶光子晶体制备与应用

北京大学学报（自然科学版）

GaN基二维八重准晶光子晶体制备与应用

张振生¹,章蓓²,徐军,经光银

北京大学物理学院，人工微结构和介观物理国家重点实验室，北京，100871；¹E-mail: zszhang3h@gmail.com；²E-mail: beiz@water.pku.edu.cn

收稿日期:2004-09-09 出版日期:2006-01-20 发布日期:2006-01-20

Fabrication and Application of Gallium Nitride-Based Two-Dimensional Octagonal Photonic Quasicrystals

ZHANG Zhensheng, ZHANG Bei, XU Jun, JING Guangyin

School of Physics, Peking University, Beijing, 100871

Received:2004-09-09 Online:2006-01-20 Published:2006-01-20

摘要/Abstract

摘要： 针对半导体发光管（LED）器件普遍存在的出光效率低下的问题，首次采用聚焦离子束技术成功地在GaN基发光器件上制备了GaN二维八重准晶光子晶体（2D-8PQCs）结构。并将二维八重准晶光子晶体应用于电注入器件，当刻蚀孔径为600nm，空气填充因子为30％时，得到了表面出光效率高达2.5倍的增强。通过微区电致发光与发光图样的研究，证实二维八重准晶光子晶体结构抑制了导波模式的传播，将LED中导波模式耦合到辐射模式，从而起到改进表面出光的作用。上述结果为二维准晶光子晶体在GaN基发光器件中的应用提供了一种可能的途径。

关键词: GaN, 二维光子晶体, 准晶, 聚焦离子束刻蚀, 出光效率

Abstract: In order to solve the general problem of low extraction efficiency of conventional semiconductor light emitting diodes (LED), Gallium nitride (GaN)-based two-dimensional octagonal photonic quasicrystals (2D-8PQCs) structures were firstly fabricated and successfully applied on the GaN-based emitters by means of focused ion beam (FIB) etching. When the diameter of holes and air filling factor of 2D8PQC are 600nm and 30% respectively, the enhancement factor of the surface light extraction efficiency of the 2D-8PQC was achieved as high as 2.5 under current injection. The effects of 2D-8PQCs on the emitters were studied by the measurements of microscopic electrical luminescence and emitting images. It confirmes that the guided modes are blocked and coupled out into radiation modes by the 2D-8PQCs. The surface light extraction is consequently enhanced. It provides a promising way of the application of 2D-PQC to GaN-based light emitters.

Key words: GaN, two_dimensional photonic crystals, quasicrystals, focused ion beam etching, light extraction eficiency

中图分类号:

张振生,章蓓,徐军,经光银 . GaN基二维八重准晶光子晶体制备与应用[J]. 北京大学学报（自然科学版）.

ZHANG Zhensheng,ZHANG Bei,XU Jun,JING Guangyin. Fabrication and Application of Gallium Nitride-Based Two-Dimensional Octagonal Photonic Quasicrystals[J]. Acta Scientiarum Naturalium Universitatis Pekinensis.

导出引用管理器 EndNote|Ris|BibTeX

链接本文: https://xbna.pku.edu.cn/CN/

https://xbna.pku.edu.cn/CN/Y2006/V42/I1/51

[1]	周嵘, 吴朝东, 张亚楠. 基于生成对抗网络的砂岩薄片图像视野外重建[J]. 北京大学学报自然科学版, 2023, 59(2): 231-241.
[2]	杜彦浩,罗伟科,吴洁君, John Goldsmith, 韩彤,杨志坚,于彤军, 张国义. HVPE异质外延GaN的函数控制方法研究[J]. 北京大学学报（自然科学版）, 2012, 48(3): 371-375.
[3]	隋文辉, 章蓓, 王大军, 栾峰, 徐万劲, 马晓宇. 用微结构改进InGaAlP量子阱发光二极管的出光强度[J]. 北京大学学报（自然科学版）, 2003, 39(3): 331-335.
[4]	贾圣果,俞大鹏. GaN纳米线的成核及生长机制研究[J]. 北京大学学报（自然科学版）, 2003, 39(3): 336-340.
[5]	龙涛,杨志坚,张国义. 应用Mg离子注入获得高表面空穴载流子浓度P-型GaN[J]. 北京大学学报（自然科学版）, 2001, 37(5): 701-704.
[6]	谢大韬, 徐怡庄, 彭卿, 黄田匀, 吴瑾光, 徐光宪. 金属-脱氧胆酸凝胶体系中的分形沉淀及维数计算[J]. 北京大学学报（自然科学版）, 1997, 33(2): 137-141.