用扫描电容显微镜(SCM)研究金基底上的铝纳米粒子

北京大学学报（自然科学版）

用扫描电容显微镜(SCM)研究金基底上的铝纳米粒子

刘赛锦,侯士敏,申自勇,张琦锋,郭等柱,薛增泉

北京大学电子学系，北京，100871

收稿日期:2001-05-09 出版日期:2002-05-20 发布日期:2002-05-20

Study of Al Nanoparticles on Au Substrate with Scanning Capacitance Microscopy

LIU Saijin，HOU Shimin，SHEN Ziyong，ZHANG Qifeng，GUO Dengzhu，XUE Zengquan

Department of Electronics, Peking University, Beijing, 100871

Received:2001-05-09 Online:2002-05-20 Published:2002-05-20

摘要/Abstract

摘要： 对升高模式扫描电容显微镜(LM-SCM)进行了理论分析，发现在小振幅近似下针尖的振幅直接正比于样品表面电容的梯度分布。利用升高模式扫描电容显微镜(LM-SCM)研究了金基底上铝纳米粒子的形貌和表面电容，分析了电容像的衬度与针尖的提升高度之间关系，并在实验中得到了验证。

关键词: 扫描电容显微镜(SCM), 电容梯度, 铝纳米粒子

Abstract: The theory of lift-mode scan capacitance microscope(LM-SCM)is analyzed. Under the hypothesis of small amplitude, it is found that the oscillation amplitude of the cantilever is directly proportional to the gradient of the surface capacitance. The surface morphology and capacitance of aluminum nanoparticles were studied with LM-SCM. The relationship between the contrast of the capacitance image and the lift height of the cantilever was analyzed and proved in experiments.

Key words: scanning capacitance microscopy, capacitance gradient, aluminum nanoparticles

中图分类号:

O485

刘赛锦,侯士敏,申自勇,张琦锋,郭等柱,薛增泉. 用扫描电容显微镜(SCM)研究金基底上的铝纳米粒子[J]. 北京大学学报（自然科学版）.

LIU Saijin,HOU Shimin,SHEN Ziyong,ZHANG Qifeng,GUO Dengzhu,XUE Zengquan. Study of Al Nanoparticles on Au Substrate with Scanning Capacitance Microscopy[J]. Acta Scientiarum Naturalium Universitatis Pekinensis.

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https://xbna.pku.edu.cn/CN/Y2002/V38/I3/364