Nodal Model Simulation of an Accelerometer

Abstract

Abstract: A capacitive accelerometer is simulated using the basic nodal model of components such as beam, plate mass, lumped mass, gap, squeeze film damper and anchor, which are implemented under ZeniVDE^TM. The simulation includes static, time domain and frequency domain simulation. The simulation result is in good coincidence with the experiment result and simulation result of ANSYS, a general FEA simulator.

Key words: VHDL-AMS, modal design, MEMS, CAD, analog & mixed signal

摘要： 利用在Zeni VDE平台下建立的梁、平板质量、集总质量、气隙、压膜阻尼和锚点等结点化基本单元模型，对一种电容式加速度计系统进行了一系列的仿真，仿真内容包括静态仿真，时域仿真和频域仿真等。仿真结果和商用仿真工具ANSYS的仿真结果以及试验数据保持良好的一致。

关键词: VHDL-AMS, 结点化设计, MEMS, CAD, 模拟混合信号

CLC Number:

XIAO Zhiyong,YANG Zhenchuan,ZHANG Haixia,HAO Yilong. Nodal Model Simulation of an Accelerometer[J]. Acta Scientiarum Naturalium Universitatis Pekinensis.

肖志勇, 杨振川, 张海霞, 郝一龙. 加速度系统的结点化模型仿真[J]. 北京大学学报（自然科学版）.

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URL: https://xbna.pku.edu.cn/EN/

https://xbna.pku.edu.cn/EN/Y2004/V40/I3/432

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Nodal Model Simulation of an Accelerometer

加速度系统的结点化模型仿真

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