Acta Scientiarum Naturalium Universitatis Pekinensis

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Nodal Model Simulation of an Accelerometer

XIAO Zhiyong, YANG Zhenchuan, ZHANG Haixia, HAO Yilong   

  1. Institute of Microelectronics, Peking University, Beijing, 100871
  • Received:2003-11-04 Online:2004-05-20 Published:2004-05-20


肖志勇, 杨振川, 张海霞, 郝一龙   

  1. 北京大学微电子学研究院,北京,100871

Abstract: A capacitive accelerometer is simulated using the basic nodal model of components such as beam, plate mass, lumped mass, gap, squeeze film damper and anchor, which are implemented under ZeniVDETM. The simulation includes static, time domain and frequency domain simulation. The simulation result is in good coincidence with the experiment result and simulation result of ANSYS, a general FEA simulator.

Key words: VHDL-AMS, modal design, MEMS, CAD, analog & mixed signal

摘要: 利用在Zeni VDE平台下建立的梁、平板质量、集总质量、气隙、压膜阻尼和锚点等结点化基本单元模型,对一种电容式加速度计系统进行了一系列的仿真,仿真内容包括静态仿真,时域仿真和频域仿真等。仿真结果和商用仿真工具ANSYS的仿真结果以及试验数据保持良好的一致。

关键词: VHDL-AMS, 结点化设计, MEMS, CAD, 模拟混合信号

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