Abstract: The theory of lift-mode scan capacitance microscope(LM-SCM)is analyzed. Under the hypothesis of small amplitude, it is found that the oscillation amplitude of the cantilever is directly proportional to the gradient of the surface capacitance. The surface morphology and capacitance of aluminum nanoparticles were studied with LM-SCM. The relationship between the contrast of the capacitance image and the lift height of the cantilever was analyzed and proved in experiments.

Key words: scanning capacitance microscopy, capacitance gradient, aluminum nanoparticles

摘要： 对升高模式扫描电容显微镜(LM-SCM)进行了理论分析，发现在小振幅近似下针尖的振幅直接正比于样品表面电容的梯度分布。利用升高模式扫描电容显微镜(LM-SCM)研究了金基底上铝纳米粒子的形貌和表面电容，分析了电容像的衬度与针尖的提升高度之间关系，并在实验中得到了验证。

关键词: 扫描电容显微镜(SCM), 电容梯度, 铝纳米粒子