Abstract: A capacitive accelerometer is simulated using the basic nodal model of components such as beam, plate mass, lumped mass, gap, squeeze film damper and anchor, which are implemented under ZeniVDE^TM. The simulation includes static, time domain and frequency domain simulation. The simulation result is in good coincidence with the experiment result and simulation result of ANSYS, a general FEA simulator.

Key words: VHDL-AMS, modal design, MEMS, CAD, analog & mixed signal

摘要： 利用在Zeni VDE平台下建立的梁、平板质量、集总质量、气隙、压膜阻尼和锚点等结点化基本单元模型，对一种电容式加速度计系统进行了一系列的仿真，仿真内容包括静态仿真，时域仿真和频域仿真等。仿真结果和商用仿真工具ANSYS的仿真结果以及试验数据保持良好的一致。

关键词: VHDL-AMS, 结点化设计, MEMS, CAD, 模拟混合信号