Influence of Air on the Performance of InAs Nanowire FET

doi:10.13209/j.0479-8023.2015.013

›› 2015, Vol. 51 ›› Issue (4): 585-590.DOI: 10.13209/j.0479-8023.2015.013

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Influence of Air on the Performance of InAs Nanowire FET

ZHANG Xintong¹;LI Xing¹, WANG Xiaoye²;FU Mengqi¹;YANG Tao²;CHEN Qing¹

1. Key Laboratory for the Physics and Chemistry of Nanodevices, Department of Electronics, Peking University, Beijing 100871; 2. Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083;

Received:2014-03-13 Revised:2014-04-20 Online:2015-07-20 Published:2015-07-20
About author:CHEN Qing

空气对InAs 纳米线场效应晶体管性能的影响

张昕彤¹;李星¹;王小耶²;付梦琦¹;杨涛²;陈清¹

1. 北京大学电子学系, 纳米器件物理与化学教育部重点实验室, 北京 100871; 2. 中国科学院半导体研究所, 半导体材料科学重点实验室, 北京100083;

作者简介:陈清
基金资助:
科技部重大科学研究计划(2012CB932702)资助

Abstract

Abstract: Planar field effect transistor nanodevices were fabricated based on individual InAs nanowires. The electrical performance of the devices was measured and studied in vacuum, air, N2, O2, H2O and pollutant in air, NO2. Compared with the performance in vacuum, the performance of the device in air changes, e.g. the threshold voltage of the device (VT) shifts to positive direction, the off-state current (Ioff) increases and the on-off ratio (Ion/Ioff) decreases in air. The main air component, N2, does not have distinguishable impact on the performance of the device. The effect of O2 is very weak. H2O increases Ioff, decreases Ion/Ioff and shifts VT negatively. The component of the pollutant in air, NO2 is found to bring a positive shift of VT, and an unchanged Ion/Ioff.

Key words: InAs nanowire, nanodevice, electronic property, gas sensing

摘要： 制备基于单根InAs 纳米线的平面场效应晶体管纳米器件, 测量并研究器件在真空、空气、氮气、氧气、水汽和大气污染成分二氧化氮中的电学特性。与真空中的结果相比, 空气中器件的阈值电压向正栅压方向偏移, 关态电流上升, 开关比下降。空气的主要成分氮气对器件性能没有可分辨的影响; 氧气的影响很弱; 水汽使关态电流上升, 开关比下降, 但使阈值电压向负栅压方向偏移。研究表明, 大气污染成分二氧化氮使器件的阈值电压向正栅压方向偏移, 开关比不变。研究结果表明, 空气对器件性能的影响是水汽和二氧化氮共同作用的结果。

关键词: InAs 纳米线, 纳米器件, 电学特性, 气敏

CLC Number:

O472

ZHANG Xintong;LI Xing;WANG Xiaoye;FU Mengqi;YANG Tao;CHEN Qing. Influence of Air on the Performance of InAs Nanowire FET[J]. , 2015, 51(4): 585-590.

张昕彤;李星;王小耶;付梦琦;杨涛;陈清. 空气对InAs 纳米线场效应晶体管性能的影响[J]. 北京大学学报（自然科学版）, 2015, 51(4): 585-590.

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https://xbna.pku.edu.cn/EN/Y2015/V51/I4/585

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Influence of Air on the Performance of InAs Nanowire FET

空气对InAs 纳米线场效应晶体管性能的影响

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