Active Ion-Trajectory Control at the Wafer Extreme Edge in Plasma Etch
LI Guorong, ZHAO Kui, YAN Lijun, Hiroshi Iizuka, LIU Shenjian, Tom NI, ZHANG Xing
Acta Scientiarum Naturalium Universitatis Pekinensis . 2019, (6): 1002 -1006 .  DOI: 10.13209/j.0479-8023.2019.066

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