Gas-Assisted Etching of Micro-Hole Lattice Array on Lithium Niobate with Focused Ion Beam
XU Xuefeng,YAN Sha,WANG Keming,WANG Xuelin,XUE Jianming,WANG Yugang
Acta Scientiarum Naturalium Universitatis Pekinensis . 2009, (6): 937 -940 . 

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