Abstract: The work on fabrication of MgB₂ superconducting thin films via E?Beam evaporation approach is reported. With the Boron film and Mg/B multilayer precursors followed by post?annealing at 900℃ and 750℃ respectively, high quality MgB₂ films have successfully been achieved. Superconducting properties of the samples have been measured and the crystal structure and surface topography have also been characterized. The results showed the performance of these two types of samples was significantly different. Some analyses have been proposed to explain this contrast. Besides, a microwave resonator has been realized based on the superconducting MgB₂ films prepared by this technique.

Key words: MgB₂, superconducting film, E?Beam evaporation, annealing process, microwave resonator

摘要： 报道了采用电子束蒸发技术实现MgB₂薄膜制备的实验工作。通过蒸镀B膜和Mg/B多层膜两种前驱体，分别经高温区(～900℃)和中温区(～700℃)退火处理后成功获得了高质量的MgB₂薄膜样品。对样品的超导性能、晶体结构和表面形貌进行了详细的测量和表征，并对两类样品性质上所表现出的差异进行了分析。此外，还报道了在薄膜制备基础上利用微加工技术实现的超导微波谐振器的结果。

关键词: MgB₂, 超导薄膜, 电子束蒸发, 退火处理, 微波谐振器