Abstract: In Situ annealed superconducting thin films are acquired by pulsed laser deposition method. With SEM, X-ray diffraction analysis, magnetic measurement (by Magnetic Property Measurement System), the effects of growth and annealing conditions are analyzed. It indicats that the growth temperature, annealing temperature and time greatly affects the quality of MgB₂ films. The films grown at 200℃, annealed for 5min at different temperatures ranged from 280℃ to 820℃ are carefully compared to study the effect of annealing temperature. The film acquired at the highest T_c of 33K grows at 200℃, annealed at 670, 720℃ for 5min, X-ray analysis shows that it has c axis orientation. The films which were grown at 200℃ and annealed at 670℃ for different time are compared to study the effect of annealing temperature. The films grown at different temperatures but all annealed at 670℃ for 5min are also compared to study the effect of growth temperature.

Key words: MgB₂, superconducting thin films, pulsed laser deposition, In Situ annealing

摘要： 采用脉冲激光沉积的方法在 Al₂O₃（0001）基片上先生成 Mg-B 混和薄膜，然后采用原位后退火的方法生成 MgB₂ 超导薄膜，采用磁测量（M-T）、X射线衍射、扫描电子显微镜技术分析了各种沉积及退火条件对 MgB₂ 超导薄膜表面形貌、晶体结构、超导电性的影响。在沉积温度为 200 ℃，退火时间 5min 时，改变退火温度得到一组薄膜，研究退火温度对超导薄膜性质的影响，得到了转变温度-退火温度曲线。在退火温度为 670℃、720℃ 时，得到了最高的临界转变温度 T_c=33K，X射线衍射结果表明此时的薄膜有 c 轴取向。同时比较了在 200℃ 下沉积，在 670℃ 下分别退火不同时间的薄膜的超导性质。还比较了分别在不同温度下沉积，然后在 670℃ 下退火 5min 的薄膜的超导性质。结果表明，沉积温度和退火温度、退火时间极大的影响了薄膜的各种性质。

关键词: MgB₂, 超导薄膜, 脉冲激光沉积, 原位后退火