Effect of PVD Process on the Crystallization of IGZO Thin Films
XIE Huafei, LU Macai, LIU Nian, CHEN Shujhih, ZHANG Shengdong, LEE Chiayu
Acta Scientiarum Naturalium Universitatis Pekinensis . 2019, (6): 1021 -1028 .  DOI: 10.13209/j.0479-8023.2019.067

Copyright © Acta Scientiarum Naturalium Universitatis Pekinensis, All Rights Reserved.
Powered by Beijing Magtech Co., Ltd.