Abstract: An on-chip ADC for readout circuit (ROIC) of microcantilever-based infrared focal plane array (IRFPA) is presented. Pipeline structure is employed for power and area efficiency. Multi-bit first stage with overflow detection and stage scaling down are adopted to optimize the power dissipation of ADC. The prototype ADC is fabricated in 0. 35μm CMOS process. Measurement results show that the power dissipation is 98 mW from a 5V supply, DNL and INL is - 0. 8/ 0. 836 LSB and - 0. 9/1. 6 LSB, respectively. With a 1 MHz input signal, the ADC achieves 82dB SFDR and 67 dB SNDR at 10 M samples/s.

Key words: IRFPA, microcantilever, ROIC, on-chip ADC

摘要： 设计了一种用于微悬臂梁红外焦平面读出电路的片上 ADC。该 ADC 采用流水线结构实现, 采用带溢出检测的多位第一级和后级功耗逐级缩减的方案优化系统功耗, 提高线性度。该设计采用 0.35 μm 的 CMOS 工艺流片验证。测试结果表明: 5V 电源电压、10M 采样率时电路总功耗为98 mW, 微分非线性和积分非线性分别为 -0.8/0. 836 LSB 和 - 0. 9 / 1. 6 LSB; 输入频率为 1 MHz 时, SFDR 和 SNDR 分别为82 和 67 dB。

关键词: 红外焦平面阵列, 微悬臂梁, 读出电路, 片上模数转换器