Abstract: The intense pulsed ion beam (IPIB) mixing effect of Ni/Ti and Al/Ti systems are studied. Compared with common ion beam, it is obvious that the mixing layers formed by IPIB irradiation are thicker, and the mixing rate is much higher. However, the IPIB mixing effects are various for different film/substrate systems because of their different thermodynamic properties. During IPIB irradiation, film material lost seriously, especially for the samples with big differences in their film and substrate thermal dynamic parameters. Two IPIB mixing mechanisms which are distinct from common ion beam mixing are discussed and the reason of mass loss of film materials are analyzed.

Key words: intense pulsed ion beam, ion beam mixing, thermodynamic properties, mass loss

摘要： 研究了强脉冲离子束(IPIB)对Ni/Ti和Al/Ti体系的混合效果，并与常规离子束混合进行了对比研究，表明IPIB辐照确实获得了比常规离子束辐照更厚的混合层，且混合效率远高于常规离子束。但对于不同的膜/基体体系，IPIB混合效果相差很大。这与膜和基体的热力学特性的差异相关。在IPIB辐照过程中，膜材料损失严重，特别是膜和基体的热力学特性差异大的样品损失更加严重。探讨了IPIB辐照不同于常规离子束混合的两种特殊混合机制以及膜材料损失的原因。

关键词: 强脉冲离子束, 离子束混合, 热力学特性, 质量损失