Abstract: Structure design of metal nano-electrode for nano-electronic device is investigated. It is found that the height of the metal electrode, the distance between the source and drain electrodes, the thickness of the SiO₂ insulation layer and the materials of the nano-electrode play important roles in the electrical property of the nano electronic device. A single-walled carbon nanotubes bundle based on field-effect transistor is fabricated accordingly, and its I-V characteristic is measured.

Key words: single walled carbon nanotube, chemical vapor deposition, schottky barriers, field-effect transistor

摘要： 研究了场效应纳电子晶体管构造过程中金属电极的结构设计，源-漏电极高度、SiO₂绝缘层厚度以及金属电极选材等因素对器件性能有关键的影响。在此基础上测量了单壁碳纳米管束的场效应行为，构造成功基于单壁碳纳米管束的场效应晶体管。

关键词: 单壁碳纳米管, 化学气相沉积, 肖特基势垒, 场效应晶体管