Acta Scientiarum Naturalium Universitatis Pekinensis

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Study on Vacuum Fabrication of Ag-O-Cs Thin Films with Internal Field-assisted Structure

ZHANG Qifeng,LIU Weimin,XUE Zengquan,WU Jinlei   

  1. Department of Electronics, Peking University, Beijing, 100871
  • Received:2000-03-08 Online:2001-05-20 Published:2001-05-20

内场助结构Ag-O-Cs光电发射薄膜真空制备研究

张琦锋,刘惟敏,薛增泉,吴锦雷   

  1. 北京大学电子学系,北京,100871

Abstract: With the aid of baffle movement, a technique named masking pretreatment and the method of vacuum deposition have been used to fabricate the Ag-O-Cs photoemissive thin films with internal field-assisted structure for the first time. The internal field-assisted photoemission characteristics of Ag-O-Cs thin films show that the photoelectric sensitivity is increased when the internal electric field is applied to the thin films, which indicates that the electric field has been effectively provided to the thin films by the above-mentioned internal field-assisted structure. Such an enhanced photoemission is attributed to the variations in energy-band structure of Ag-O-Cs thin films, and which are considered to induce the lower-energy electrons to participate in the photoemission.

Key words: internal field-assisted photoemission, Ag-O-Cs photocathode, vacuum deposition fabrication

摘要: 通过掩膜预处理和挡板转移技术的配合,利用真空沉积方法首次制备了内场助结构Ag-O-Cs 光电发射薄膜。Ag-O-Cs薄膜内场助光电发射特性测试结果表明,该方法能够有效地实现Ag-O-Cs 薄膜体内电场的加载与表面电极的引出,薄膜光电灵敏度随内场偏压的增大而上升。Ag-O-Cs 薄膜在内场作用下的光电发射增强现象与薄膜体内能带结构变化、低能电子参与光电发射等物理机制有关。

关键词: 内场助光电发射, Ag-O-Cs光电阴极, 真空沉积制备

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